|
|
Thermal
Evaporation |
|
|
E-beam
Evaporation |
|
|
Magnetron
Sputtering |
|
|
Suitable |
| Any
other (Please specify) |
|
|
| |
| How
many sources do you require to be incorporated?
|
|
|
One |
|
|
Two |
|
|
Three |
| More
(Please specify) |
|
|
|
|
| What
pumping system do you require?
|
|
|
Turbo
molecular pump based |
|
|
Diffusion
pump based |
| |
| Pump-down
procedure required |
|
|
Auto
pump-down |
|
|
Semi
automatic |
| |
| What
is the number and nature of reactive gases do you plan? |
|
|
| |
| What
is the range of substrate temperature? |
|
|
Up
to 2000C
|
|
|
Up
to 3500C
|
|
|
Up
to 5000C
|
| More
(Please specify)
|
|
|
|
|
| Design
of substrate holder
|
|
|
Rotation
required
|
|
|
Bias
facility
|
|
|
Water
cooling required
|
|
|
|
|
Please
specify if soft pumping is required
|
|
|
Name and
Designation: *
|
My e-mail
address is: *
|
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*
Indicates required fields
|
