MILMAN THIN FILM SYSTEMS PVT. LTD.
 
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Compact Coating Platform

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MAIN FEATURES:
  • State of the art compact magnetron sputtering system for continuous 24 x 7 production.
  • Unique design of milman make magnetron sputtering cathode assemblies with rare earth magnets and dc/pulsed dc/rf compatibility
  • High vacuum compatible heaters along with pid control and thyristorized power control for precise temperature measurement & control
  • Pulsed dc magnetron sputtering power supplies with advance arc control, pulse width and frequency control
  • Pulsed dc bias power supply with facility for ion etching and substrate bias / etch.
  • PLC-PC based automation for complete process control
  • Single skid design for complete plug and play operation