Series 3000

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MAIN FEATURES: Advanced spin coater with pc interface Speed ranges available are 0-6000rpm/0-10000rpm Unlimited multistep recipie programming, storage and recall Independent control over acceleration, spin time and decceleration Closed loop speed control with digital servo drive All safety interlocks for vacuum breakdown, door open and zero speed Wide range of accessories like vacuum pump, hot plate, foot switch etc.

SPIN COATING UNIT model 3000 series from MILMAN is a multistage PC interfaced spin coater .This is a special and precise design to coat thin films of photoresists, sol-gels, paints, polymides, anti-reflective and other liquids on substrate sizes upto 6"×6".Available Speed ranges are 0-6000 RPM / 0-10000 RPM. The unit is fully programmable and user friendly. The spin coating unit is provided with Top plate assembly, motor assembly, safety interlocks, vacuum chuck and wide range of accessories.

1. PTFE bowl with drain and N2 purge connection.
2. Acrylic bowl cover.
3. Custom built vacuum chuck (for substrates with diameter 3" or greater).
4. Direct indication for vacuum at chuck.
5. Acrylic top cover plate (door).
6. Foot switch to start and stop operation.
7. Dual vacuum release switch: Electromagnetic vacuum release along with integrated manual vacuum release.
8. Utilities connections are at the rear of unit.
9. Cycle status display on PC.

1. Spin speed range from 0 to 10000 RPM.
2. Acceleration/ Deceleration ranges from 1 to 1200 RPM/sec.
3. 0 to 1000 Sec. timer with 1 Sec. increment.
4. Closed loop speed control.

1. User friendly software.
2. Programmable multi steps.
3. For each step speed, time, acceleration are programmable.
4. Unlimited recipes can be stored for substrate.
5. Any recipe (program) can be viewed, modified and run.

1. 250 RPM run (inch) even with interlocks not O.K.
2. Recipe mode: select and run recipe from stored set.
3. Program mode: set all parameters; save and run.

1. Vacuum interlock.
2. Door open interlock.
3. Zero speed interlock.
4. System ready indicator.
5. Auxiliary’ interlock for future use.

1. Desktop computer for interfacing.
2. N2 purge facility.
3. Vacuum pump.
4. Hot plate for baking.
5. 250uL micro syringe.
6. Auto liquid dispenser.