MILMAN THIN FILM SYSTEMS PVT. LTD.
MILMAN THIN FILM SYSTEMS PVT. LTD.
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Subsystems


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  • Standard sizes 2”, 3”, 4”, and 6 “ circular and rectangular cathode size till 5” x 38”
  • HV / UHV compatible with standard flanges
  • High strength Rare earth and magnet module option allows Sputtering of Permeable materials
  • Compatibility with DC, Pulsed DC or RF operation
  • Integrated Argon gas inlet assembly
  • Optimized turbulent water flow to provide uniform target cooling
  • Low operating pressures
  • UBM option available in all categories
 

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  • Available in 2.5, 5 and 40 kw versions.
  • Capability of switching in three separate targets.
 


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  • Makes use of advanced high-frequency switching Technology
  • The process employs alkaline electrolytes with PH in the range 8 -12 and is thus environmentally sound.
  • Peak voltage up to 800 V
  • Pulsed frequency up to10 KHz
  • Duty cycle is continuously variable between 10% to 90%
  • Power output up to 10 KW
  • Active Arc suppression design
  • Long duration up to 24 hrs. Continuous operation possible.
  • Constant voltage / constant current operation possible
  • 5.7" TFT color touch screen HMI with 6 function keys
  • Small footprint