MILMAN THIN FILM SYSTEMS PVT. LTD.
MILMAN THIN FILM SYSTEMS PVT. LTD.
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MAIN FEATURES:
  • Standard sizes 2”, 3”, 4”, and 6 “ circular
  • Rectangular cathode size available up to 38 “ length in 5” or 170 mm width
  • HV / UHV compatible with standard flanges
  • High strength Rare earth magnet module isolated from water
  • Magnet modules designed for Sputtering of Permeable materials available
  • Compatibility with DC, Pulsed DC or RF operation
  • Integrated Argon gas inlet assembly
  • Optimized turbulent water flow to provide uniform target cooling
  • Low operating pressures of 10-3 mbar for pure films
  • UBM option available in all categories