MILMAN THIN FILM SYSTEMS PVT. LTD.
MILMAN THIN FILM SYSTEMS PVT. LTD.
Home    Magnetron Cathodes
Our Products
Magnetron sputtering cathodes are available in wide range of standard circular (Diameter from 2” till 8”) as well as rectangular geometries (from 5” x 8” to 170 mm x 40”). Sources can be offered in custom-built configuration to suit existing deposition platforms. They are easy to install and can be adapted to any system without loss in performance. The high strength rare earth magnet module ensures high sputtering rates rendering high productivity coupled with high target utilization.

Click to Enlarge

Click to Enlarge 

MAIN FEATURES:
  • Compact and easy to install design with Integrated shutter assembly
  • High strength rare earth magnet module allows sputtering of permeable materials up to 3 mm thickness
  • High sputtering rate coupled with excellent target utilization.
  • Integrated argon gas inlet assembly.
  • Optimized turbulent water flow to provide uniform target cooling.
  • Low operating pressures.
  • Flexibility to accept target in 'clamp on' or 'bonded' configuration to cover broad range of thicknesses down to foils.
  • External or internal mounting optional.
  • UBM option available in all categories.
  • UHV compatible sources are also available
  • Tiltable cathodes available on request