MILMAN THIN FILM SYSTEMS PVT. LTD.
MILMAN THIN FILM SYSTEMS PVT. LTD.
Home    Compact Coating Platform

Compact Coating Platform is one of the most versatile Sputter coater introduced by MILMAN. Platform is configured around coating zone of Dia. 150 X 300 mm and is surrounded by two 5” x 15” rectangular cathodes as well as two 6” diameter circular cathodes. Equipment is designed to undertake continuous production on small scale. Equipment is able to undertake MoS2 based coatings.

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MAIN FEATURES:
  • State of the art compact magnetron sputtering system for continuous 24 x 7 production.
  • Unique design of MILMAN make magnetron sputtering cathode assemblies with rare earth magnets and DC/pulsed DC/RF compatibility
  • High vacuum compatible INCONEL based heaters along with PID and thyristorized power supply for precise temperature measurement and control
  • Pulsed DC magnetron sputtering power supplies with advance arc control, pulse width and frequency control
  • Pulsed DC bias power supply with facility for ion etching and substrate bias / etch.
  • PLC-PC based automation for complete process control
  • Single skid design for complete plug and play operation and fast installation