MILMAN THIN FILM SYSTEMS PVT. LTD.
MILMAN THIN FILM SYSTEMS PVT. LTD.
Home    Reactive Ion Etching System
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MAIN FEATURES:
  • Anodized aluminium based planar electrode assembly for uniform gas flow dynamics
  • Interchangable substrate holder assembly to accommodate various substrate sizes
  • Fully automatic PLC-PC based control with recipie programming
  • Gas manifold with mass flow controllers [mfcs] for precise process control
  • Capacitance diaphragm gauge and variable conductance valve for closed loop pressure control
  • RF power source with continuously variable power control for process optimization
  • Safety interlocks for operator safety
  • PLC-PC based automation for process control