Thermal Evaporation Equipment

The MILMAN make Versatile Vacuum Coater is an ideal platform for Thin Film Deposition by Thermal Evaporation. Thermal Evaporator evaporates thin films of high purity material onto the substrate under HV /UHV environment. The system provides flexibility of adding features namely substrate heating, bias and rotation. Provision is made to add Quartz Crystal based digital Thickness Monitor. The system is engineered for continuous operation and high [> 95 %] uptime providing high reliability.

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MAIN FEATURES: All SS 304 construction of Vacuum Chamber, Valves and Vacuum Plumbing alongwith Viton O-rings and seals Complete PLC based Automation with HMI and MIMIC display. Turbo Molecular based pumping for clean vacuum. Single / Double source or Geneva mechanism with Four sources. SCR controlled L.T. Power Supply 200 / 400A, 10V. Glow Discharge cleaning facility. Substrate Heating, Bias and Rotation facility. Extra ports for adding various process options. Use of CE certified critical Electrical parts. Low Down Time and High Reliability. All Interlocks for Cooling Water, Low Vacuum, Compressed Air Failure etc. for Safe Operation