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Plasma Ion Nitriding Equipment
Plasma Ion Nitriding Equipment
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MAIN FEATURES:
Novel hot retort design to enhance heat transfer and lower heat loss.
Three zone heating with independent temperature control.
Fully automatic PLC / PC based control with Scada package to provide recipie storage, recall for process repeatability.
Closed loop pressure control.
Precision mass flow controllers provide excellent control over gas phase chemistry.
50 KHz pulsed DC power supply with advanced arc control and setting of peak voltage, pulse frequency and duty cycle.
Online fine temperature control by duty cycle control during Nitriding.
Integration of dual process chamber possible to enhance productivity.
Roll in and roll out substrate table.
Central anode facility.
Convective cooling fan facility for faster job cooling.
Temperature uniformity within ±5°C over entire region of substrate table.
