MILMAN THIN FILM SYSTEMS PVT. LTD.
MILMAN THIN FILM SYSTEMS PVT. LTD.
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MAIN FEATURES:
  • State of the art compact magnetron sputtering system for continuous 24 x 7 production.
  • Unique design of MILMAN make magnetron sputtering cathode assemblies with rare earth magnets and DC/pulsed DC/RF compatibility
  • High vacuum compatible INCONEL based heaters along with PID and thyristorized power supply for precise temperature measurement and control
  • Pulsed DC magnetron sputtering power supplies with advance arc control, pulse width and frequency control
  • Pulsed DC bias power supply with facility for ion etching and substrate bias / etch.
  • PLC-PC based automation for complete process control
  • Single skid design for complete plug and play operation and fast installation