MILMAN THIN FILM SYSTEMS PVT. LTD.
MILMAN THIN FILM SYSTEMS PVT. LTD.
Home    Plasma Enhanced Deposition System
Our Products
MAIN FEATURES:
  • Planar electrode assembly for uniform gas flow dynamics
  • Interchangable substrate holder assembly to accommodate various substrate sizes
  • Fully manual / semi-automatic [timer based] controls with upgradability for fully automatic PLC/PC based control with recipie programming
  • Gas manifold with Mass Flow Controller [MFC] for precise process control
  • Capacitance diaphragm Gauge and Variable Conductance Valve for Closed Loop Pressure control
  • RF power source with continuously variable power control for process optimization
  • Pulsed DC source with facility of voltage, frequency and duty cycle control
  • High reliability and low maintainance